Ion beam-induced anisotropic plastic deformation of silicon microstructures

Applied Physics Letters

Volumn 84, Issue 18, 2004, Pages 3591-3593

  Van Dillen, T ^a   De Dood, M J A ^a   Penninkhof, J J ^a   Polman, A ^a   Roorda, S ^b   Vredenberg, A M ^c  

^a FOM INSTITUTE AMOLF   (Netherlands)

^b UNIVERSITÉ DE MONTRÉAL   (Canada)

^c UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANISOTROPY; CRYSTALLINE MATERIALS; FABRICATION; GLASS TRANSITION; ION BEAMS; IONS; IRRADIATION; MICROSTRUCTURE; PLASTIC DEFORMATION; SCANNING ELECTRON MICROSCOPY;

ANISOTROPIC DEFORMATION; ION ENERGY; PLASTIC STRAINS; SILICON PILLARS;

SEMICONDUCTING SILICON;

EID: 2542488402     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1737480     Document Type: Article

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