Conditions for image-based identification of SPM-nanopositioner dynamics

IEEE/ASME Transactions on Mechatronics

Volumn 14, Issue 4, 2009, Pages 405-413

  Clayton, Garrett M ^a   Devasia, Santosh ^b  

^a Villanova University   (United States)

^b University of Washington   (United States)

Author keywords

Atomic force microscopy; Control systems; Nanotechnology; Piezoelectric transducers; Scanning probe microscope (SPM); Scanning tunneling microscope (STM)

Indexed keywords

CALIBRATION SAMPLES; EXTERNAL SENSORS; IMAGE-BASED; NANO-POSITIONER; POSITIONING ERROR; SCANNING PROBE MICROSCOPE; SCANNING PROBE MICROSCOPE (SPM); SCANNING TUNNELING MICROSCOPE (STM); SCANNING TUNNELING MICROSCOPES; STANDARD CALIBRATION;

ACOUSTOOPTICAL EFFECTS; ATOMIC FORCE MICROSCOPY; ATOMS; CALIBRATION; IDENTIFICATION (CONTROL SYSTEMS); INTERFACES (MATERIALS); MICROSCOPES; NANOTECHNOLOGY; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PROBES; SCANNING TUNNELING MICROSCOPY; WIND TUNNELS;

SCANNING;

EID: 69549119984     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2009.2023987     Document Type: Article

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