Mechanical and thermoelastic characteristics of optical thin films deposited by dual ion beam sputtering

Applied Optics

Volumn 48, Issue 23, 2009, Pages 4536-4544

  Eda, Çetinörgü ^a   Baloukas, Bill ^a   Zabeida, Oleg ^a   Klemberg Sapieha, Jolanta E ^a   Martinu, Ludvik ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ERBIUM; FIBER OPTIC SENSORS; FILM GROWTH; ION BEAMS; IONS; NIOBIUM OXIDE; OPTICAL COATINGS; OPTICAL PROPERTIES; OXIDE FILMS; REFRACTIVE INDEX; SILICON OXIDES; SPUTTERING; TANTALUM OXIDES; THERMAL EXPANSION; THERMOELASTICITY; THIN FILMS;

DUAL ION BEAM SPUTTERING; GROWTH CONDITIONS; HIGH REFRACTIVE INDEX; OPTICAL COATING SYSTEMS; OPTICAL THIN FILMS; SCRATCH RESISTANCE; SECONDARY BEAMS; THERMOELASTIC PROPERTIES;

OPTICAL FILMS;

EID: 69049102472     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.004536     Document Type: Article

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