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Volumn 88, Issue 8, 2005, Pages 2169-2176

Residual stress and microstructural evolution in tantalum oxide coatings on silicon nitride

Author keywords

[No Author keywords available]

Indexed keywords

MICROSTRUCTURAL EVOLUTION; PHASE STABILITY; SILICON NITRIDE-BASED CERAMICS; TANDALUM OXIDE;

EID: 27644563450     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2005.00396.x     Document Type: Article
Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.