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Volumn 26, Issue 8, 2009, Pages
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Robust low voltage program-erasable cobalt-nanocrystal memory capacitors with multistacked Al2O3/HfO 2/Al2 O3 tunnel barrier
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
ALUMINUM OXIDE;
ATOMIC LAYER DEPOSITION;
COBALT;
HAFNIUM OXIDES;
ATOMIC LAYER DEPOSITED;
CO NANOCRYSTALS;
COBALT NANOCRYSTALS;
HFO 2;
LOW VOLTAGES;
MEMORY WINDOW;
NANOCRYSTAL MEMORY;
PROGRAM ERASABLE;
PROGRAM/ERASE;
TUNNEL BARRIER;
NANOCRYSTALS;
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EID: 68949209174
PISSN: 0256307X
EISSN: 17413540
Source Type: Journal
DOI: 10.1088/0256-307X/26/8/087303 Document Type: Article |
Times cited : (3)
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References (14)
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