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Volumn 26, Issue 8, 2009, Pages

Robust low voltage program-erasable cobalt-nanocrystal memory capacitors with multistacked Al2O3/HfO 2/Al2 O3 tunnel barrier

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMIC LAYER DEPOSITION; COBALT; HAFNIUM OXIDES;

EID: 68949209174     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/26/8/087303     Document Type: Article
Times cited : (3)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.