Manufacture, microstructure and mechanical properties of Mo-W-N nanostructured hard films

Materials Research Bulletin

Volumn 44, Issue 10, 2009, Pages 1948-1953

  Yang, J F ^a   Yuan, Z G ^a   Zhang, G G ^b   Wang, X P ^a   Fang, Q F ^a,b  

^a INSTITUTE OF SOLID STATE PHYSICS   (China)

^b NANCHANG HANGKONG UNIVERSITY   (China)

Author keywords

A. Nitrides; A. Thin films; B. Sputtering; C. X ray diffraction; D. Mechanical properties

Indexed keywords

A. NITRIDES; A. THIN FILMS; B. SPUTTERING; C. X-RAY DIFFRACTION; D. MECHANICAL PROPERTIES;

ADHESION; ATOMS; CORROSION RESISTANCE; DIFFRACTION; HARDNESS; INDENTATION; MICROSTRUCTURE; MOLYBDENUM; NITRIDES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; STEEL; THIN FILMS; TUNGSTEN; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

MECHANICAL PROPERTIES;

EID: 68749119338     PISSN: 00255408     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.materresbull.2009.06.013     Document Type: Article

References (29)

1. Toth L.E. Transition Metal Carbides and Nitrides (1971), Academic Press, New York
2. Holleck H. J. Vac. Sci. Technol. A 4 (1986) 2661
3. Hurkmans T., Trinh T., and Lewis D.B. Surf. Coat. Technol. 76-77 (1995) 159
4. Hones P., Consiglio R., and Randall N. Surf. Coat. Technol. 125 (2000) 179
5. Ibberson R.M., and Cywinski R. Physica B 180/181 (1992) 329
6. Saha R., Inturi R.B., and Barnard J.B. Surf. Coat. Technol. 82 (1996) 42
7. Wiemer C., Sanjines R., and Levy F. Surf. Coat. Technol. 86/87 (1996) 372
8. Panjan P., Navinsek B., and Cvelbar A. Thin Solid Films 282 (1996) 298
9. Yang J.F., Liu Q., and Wang X.P. Mater. Res. Bull. 44 (2009) 86
10. Šůna J., Musil J., and Dohnal P. Vacuum 80 (2006) 588
11. Yamamoto T., Kawate M., and Hasegawa H. Surf. Coat. Technol. 193 (2005) 372
12. Song S., Liu Y., and Li M. Microelectron. Eng. 83 (2006) 423
13. Rodriguez-Carvajal J. Physica B 192 (1993) 55
14. Boukhris L., and Poitevin J.M. Thin Solid Films 310 (1997) 222
15. Silvaa P.N., Diasa J.P., and Cavaleiro A. Surf. Coat. Technol. 200 (2005) 186
16. Li D., Wang X.P., and Fang Q.F. Phys. Stat. Solidi (a) 204 (2007) 2270
17. Corbel G., Laligant Y., and Goutenoire F. Chem. Mater. 17 (2005) 4678
18. G.V. Samsonov, I.M. Vinitskii, Handbook of Refractory Compounds, New York, 1980.
19. Jones M.I., McColl I.R., and Grant D.M. Surf. Coat. Technol. 132 (2000) 143
20. Cheng H.E., and Hon M.H. J. Appl. Phys. 79 (1996) 8047
21. Yau B.-S., and Lin D. Thin Solid Films 516 (2008) 1877
22. Multman L., Münz W.D., and Musil J. J. Vac. Sci. Technol. A 9 (1991) 434
23. Zeitler M., Gerlach J.M., and Kraus T. Appl. Phys. Lett. 70 (1997) 1254
24. Alireza A., Jean P.R., and Claude T. Surf. Coat. Technol. 200 (2006) 6298
25. Callister W.D. Materials Science and Engineering (2000), John Wiley &Sons, Inc. p. 168
26. Witold G., and Tomasz S. Surf. Coat. Technol. 201 (2006) 1469
27. Yao S.H., Su Y.L., and Kao W.H. Surf. Coat. Technol. 201 (2006) 2520
28. Zheng W.T., Sjostrom H., and Ivanov I. J. Vac. Sci. Technol. A 14 (1996) 2696
29. Lee K.H., and Takai O. Diam. Relat. Mater. 14 (2005) 1444