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Diamond and Related Materials

Volumn 14, Issue 9, 2005, Pages 1444-1450

Nanoindentation study on nanomechanical characteristics of a-CN film deposited by shielded arc ion plating

(2) Lee, Kyung Hwang a,b Takai, Osamu a

a NAGOYA UNIVERSITY (Japan)

b KYOTO UNIVERSITY (Japan)

Author keywords

a CN film; Hardness; Nanoindentation; Shielded Arc Ion Plating (SAIP); Wear resistance

Indexed keywords

CARBON INORGANIC COMPOUNDS; DEFORMATION; ELASTIC MODULI; HARDNESS; INDENTATION; NANOTECHNOLOGY; STIFFNESS; WEAR RESISTANCE;

AMORPHOUS CARBON NITRIDE FILMS; ELASTIC RECOVERY; NANOINDENTATION; SHIELDED ARC ION PLATING (SAIP);

THIN FILMS;

EID: 21344461006 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.02.015 Document Type: Article

Times cited : (29)

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