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Volumn 82, Issue 1-2, 1996, Pages 42-47
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Structural and mechanical characterization of Cr-Ta-N hard coatings prepared by reactive magnetron sputtering
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Author keywords
Chromium nitride; Hard coatings; Tantalum nitride; Thin films
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Indexed keywords
CHROMIUM ALLOYS;
ELASTIC MODULI;
HARD FACING;
HARDNESS;
MAGNETRON SPUTTERING;
NITRIDES;
SILICA;
SUBSTRATES;
TANTALUM ALLOYS;
HARD COATINGS;
COATINGS;
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EID: 0030194081
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/0257-8972(95)02624-X Document Type: Article |
Times cited : (43)
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References (20)
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