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Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6298-6302

Structural and mechanical properties of IBAD deposited nanocomposite Ti-Ni-N coatings

Author keywords

Ion beam sputtering; Nanocomposite coatings; Nanoindentation; Superhard films

Indexed keywords

CRYSTALLINE MATERIALS; DEPOSITION; ION BEAM ASSISTED DEPOSITION; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; NICKEL; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON WAFERS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

EID: 33646136229     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.046     Document Type: Article
Times cited : (69)

References (33)
  • 19
    • 33646145422 scopus 로고    scopus 로고
    • RUMP-RBS Analysis and Simulation Package, M. Thompson, L. Doolittle, (c) 1988-1997 Computer Graphic Service Ltd.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.