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Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6298-6302
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Structural and mechanical properties of IBAD deposited nanocomposite Ti-Ni-N coatings
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Author keywords
Ion beam sputtering; Nanocomposite coatings; Nanoindentation; Superhard films
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Indexed keywords
CRYSTALLINE MATERIALS;
DEPOSITION;
ION BEAM ASSISTED DEPOSITION;
MECHANICAL PROPERTIES;
NANOSTRUCTURED MATERIALS;
NICKEL;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SILICON WAFERS;
TITANIUM NITRIDE;
X RAY DIFFRACTION ANALYSIS;
CRYSTALLINE PHASE;
NANOCOMPOSITE COATINGS;
NANOINDENTATION;
SCHERRER EQUATION;
SUPERHARD FILMS;
TEXTURE EVOLUTION;
COATINGS;
COATINGS;
CRYSTALLINE MATERIALS;
DEPOSITION;
ION BEAM ASSISTED DEPOSITION;
MECHANICAL PROPERTIES;
NANOSTRUCTURED MATERIALS;
NICKEL;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SILICON WAFERS;
TITANIUM NITRIDE;
X RAY DIFFRACTION ANALYSIS;
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EID: 33646136229
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.11.046 Document Type: Article |
Times cited : (69)
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References (33)
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