Helium implantation into 4H-SiC

Physica Status Solidi (A) Applications and Materials Science

Volumn 206, Issue 8, 2009, Pages 1916-1923

  Barbot, Jean François ^a   Leclerc, Stéphanie ^a   David, Marie Laure ^a   Oliviero, Erwan ^a   Montsouka, Romaric ^a   Pailloux, Frederic ^a   Eyidi, Dominique ^a   Denanot, Marie Françoise ^a   Beaufort, Marie France ^a   Declémy, Alain ^a   Audurier, Valérie ^a   Tromas, Christophe ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS STATE; BUBBLE CLUSTERS; CRACK FORMATION; DAMAGE ACCUMULATION; DEFECT ACCUMULATION; ELEVATED TEMPERATURE; FLUENCES; HELIUM IMPLANTATION; HELIUM ION; INTERSTITIALS; MICROSTRUCTURE EVOLUTIONS; NANOINDENTATION TESTS; NEAR SURFACE REGIONS; NEAR-SURFACE; PARTICULAR CONDITION; ROOM TEMPERATURE; SINGLE-CRYSTALLINE; STRAINED STATE; THERMALLY ACTIVATED; TRIBOLOGICAL TESTS; X- RAY DIFFRACTION;

ATOMIC FORCE MICROSCOPY; BLOOD SUBSTITUTES; HELIUM; PHOTODEGRADATION; SILICON CARBIDE; STACKING FAULTS; TRANSMISSION ELECTRON MICROSCOPY; VACANCIES;

MECHANICAL PROPERTIES;

EID: 68749101157     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200881468     Document Type: Conference Paper

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