Cavities in He-implanted SiC

Solid State Phenomena

Volumn 82-84, Issue , 2002, Pages 533-538

  Barbot, J F ^a   Oliviero, E ^a   David, M L ^a   Declemy A ^a   Blanchard, C ^a   Beaufort, M F ^a   Van Veen, A ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

Bubbles; He implantation; Silicon carbide

Indexed keywords

AMORPHIZATION; ANNEALING; CRYSTALLIZATION; DESORPTION; HIGH TEMPERATURE EFFECTS; ION IMPLANTATION; POINT DEFECTS;

POLYTYPISME TRANSITIONS; PRISMATIC LOOP;

SILICON CARBIDE;

EID: 4243536245     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (9)