Mechanism of hydrogen interaction with the growing silicon film

Solar Energy Materials and Solar Cells

Volumn 90, Issue 18-19, 2006, Pages 3385-3393

  Rath, J K ^a   Klerk, L A ^a   Gordijn, A ^a   Schropp, R E I ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Layer by layer deposition; Mass spectroscopy; Microcrystalline silicon; Thin film; VHF PECVD

Indexed keywords

CRYSTALLINE MATERIALS; ETCHING; HYDROGEN; REACTION KINETICS; SILICON;

LAYER-BY-LAYER DEPOSITION; MICROCRYSTALLINE SILICON; VHF PECVD;

THIN FILMS;

EID: 33748457518     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2005.10.025     Document Type: Article

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