Relative importance of hydrogen atom flux and ion bombardment to the growth of μc-Si:H thin films

Journal of Non-Crystalline Solids

Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1049-1054

  Lyka, B ^a   Amanatides, E ^a   Mataras, D ^a  

^a UNIVERSITY OF PATRAS   (Greece)

Author keywords

Crystal growth; Microcrystallinity; Nucleation; Photovoltaics; Plasma deposition; Raman scattering; Raman spectroscopy; Silicon; Solar cells; Thin film transistors

Indexed keywords

AMORPHOUS MATERIALS; CRYSTAL GROWTH; PHOTOVOLTAIC EFFECTS; RAMAN SCATTERING; SOLAR CELLS; THIN FILM TRANSISTORS; THIN FILMS;

IONS PER MONOLAYER; MICROCRYSTALLINE SILICON GROWTH; MICROCRYSTALLINITY; PLASMA PARAMETERS;

ION BOMBARDMENT;

EID: 33744534645     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.02.016     Document Type: Article

References (21)

1. Veprek S., Iqbal Z., Ostwald H.R., and Webb P. J. Phys. C 14 (1981) 295
2. Solomon I., Drevillon B., Shirai H., and Layadi N. J. Non-Cryst. Solids 164 (1993) 989
3. Tsai C., Anderson G.B., Thompson R., and Wacher B. J. Non-Cryst. Solids 114 (1989) 151
4. Shirai H., Das D., Hanna J., and Shimizu I. Appl. Phys. Lett. 59 (1991) 1096
5. Zhou J.H., Ikuta K., Yasuda T., Yamasaki S., and Tanaka K. J. Non-Cryst. Solids 227 (1998) 857
6. Street R.A. Phys. Rev. B 43 (1991) 2454
7. Robertson J. J. Appl. Phys. 93 (2003) 735
8. Kroll U., Meier J., Shah A., Mikhailov S., and Weber J.J. J. Appl. Phys. 80 (1996) 4971
9. Suzuki S., Kondo M., and Matsuda A. Sol. Energy Mater. Sol. Cells 62 (2000) 489
10. Amanatides E., Mataras D., Rapakoulias D., van den Donker M.N., and Rech B. Sol. Energy Mater. Sol. Cells 87 (2005) 795
11. Amanatides E., Hammad A., Katsia E., and Mataras D. J. Appl. Phys. 97 (2005) 073303
12. Spiliopoulos N., Mataras D., and Rapakoulias D.E. J. Vac. Sci. Technol. A 14 (1996) 2757
13. E. Amanatides, S. Stamou, S. Boghosian, D. Mataras, in: Proceedings of the 16th European Photovoltaic Solar Energy Conference, Glasgow, UK, vol. I (2000) p. 581.
14. Perrin J., Leroy O., and Bordage M.C. Contrib. Plasma Phys. 36 (1996) 3
15. Amanatides E., Stamou S., and Mataras D. J. Appl. Phys. 90 (2001) 5789
16. Guizot J.-L., Nomoto K., and Matsuda A. Surf. Sci. 244 (1991) 22
17. E. Amanatides, D. Mataras, B. Lyka, E. Katsia, D. Rapakoulias, in: Proceedings of the 20th European Photovoltaic Solar Energy Conference, Barcelona, Spain, in press.
18. Weast R. Handbook of Physics and Chemistry Bond (1999), CRC Press, Boca Baton, FL, USA
19. Pangal K., Sturm J.C., Wagner S., and Buyuklimanli T. J. Appl. Phys. 85 (1999) 1900
20. Cabarrocas P.R.I. Curr. Opin. Solid State Mater. Sci. 6 (2002) 439
21. Sriraman S., Agarwal S., Aydil E.S., and Maroudas D. Nature 418 (2002) 62