Mold-type SiC emitters with nanoholes at the apex

Measurement Science and Technology

Volumn 17, Issue 1, 2006, Pages 45-49

  Górecka Drzazga, Anna ^a   Dziuban, Jan ^a   Bargiel, Sylwester ^a   Prociów, Eugeniusz ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Nanohole; SiC emitter; Silicon etching; Transfer mold technique

Indexed keywords

ETCHING; HIGH TEMPERATURE EFFECTS; MOLDS; OXIDATION; PHOTOLITHOGRAPHY; TRANSPARENCY;

GLASS WAFER; MICROHOLES; SIC EMITTER; SILICONE MEMBRANE;

SILICON CARBIDE;

NANOTECHNOLOGY; SILICON;

EID: 29144503305     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/1/009     Document Type: Conference Paper

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