Development progress toward the fabrication of vacuum microelectronic devices using conventional semiconductor processing

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1990, Pages 163-166

  Zimmerman, S M ^a   Colavito, D B ^a   Babie, W T ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD EMISSION; SEMICONDUCTOR DIODES; SEMICONDUCTOR MATERIALS;

VACUUM MICROELECTRONIC DEVICES;

MICROELECTRONICS;

EID: 0025577133     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)