Study on bisbenzocyclobutene bonding for the development of a Si-based miniaturized reformer of fuel cell systems

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Choi, Dae Hyun ^a   Yeo, Chan Hyeok ^a   Kim, Jean Tae ^a   Ok, Chi Won ^a   Kim, Jong Seok ^a   Kwon, Yongchai ^b   Im, Yeon Ho ^a  

^a Chonbuk National University   (South Korea)

^b Inha Technical College   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BCB BONDING; BISBENZOCYCLOBUTENE; FTIR; FUEL CELL SYSTEM; GAS CHROMATOGRAPHS; MECHANICALLY STABLE; MICRO-REFORMERS; OPTICAL INSPECTION; PRESSURE AND TEMPERATURE; REFORMING PROCESS; SEMICONDUCTOR PROCESSING; SI WAFER; SI-BASED; SYSTEMATIC STUDY; THERMO-MECHANICAL;

BONDING; CELL MEMBRANES; CHEMICAL STABILITY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FUEL CELLS; FUEL SYSTEMS; INTERNET PROTOCOLS; KNOWLEDGE BASED SYSTEMS; OPTICAL TESTING; PHASE INTERFACES; REFORMING REACTIONS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS; SYSTEM STABILITY; THERMOMECHANICAL TREATMENT;

WAFER BONDING;

EID: 68249157054     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/075013     Document Type: Article

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