A micromanipulation cell including a tool changer

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages

  Clévy, Cédric ^a   Hubert, Arnaud ^a   Agnus, Jöl ^a   Chaillet, Nicolas ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; LIQUEFACTION; PIEZOELECTRIC MATERIALS; PRESSURE MEASUREMENT; SCANNING ELECTRON MICROSCOPY; SOLIDIFICATION; SURFACE MOUNT TECHNOLOGY;

MICROGRIPPER ACTUATOR; MICROMANIPULATION CELLS; PIEZOELECTRIC MICROGRIPPER; TOOL MAGAZINE;

MICROMANIPULATORS;

EID: 24644501212     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/S07     Document Type: Article

References (28)

1. Van Brussel H, Peirs J, Reynaerts D, Delchambre A, Reinhart G, Roth N, Weck M and Zussman E 2000 Assembly of microsystems Ann. CIRP 49 451-72
2. Bohringer K F, Fearing R S and Goldberg K Y 1998 Microassembly Handbook of Industrial Robotics (New York: Wiley)
3. Almansa A and Kornfeld M 2004 Ultrahigh accuracy: the challenge of nanopositioning Int. Precision Assembly Seminar (Bad Hofgastein) pp 43-50
4. Kratochvil B E, Yesin K B, Hess V and Nelson B J 2004 Design of a visually guided 6 dof micromanipulator system for 3d assembly of hybrid mems Int. Workshop on Microfactories (Shanghai) pp 128-33
5. Kim B, Kang H, Kim D H, Park G T and Park J O 2003 Flexible microassembly system based on hybrid manipulation scheme Int. Conf. on Intelligent Robots and Systems (Las Vegas) pp 2061-6
6. Yang G, Gaines J A and Nelson B J 2001 A flexible experimental workcell for efficient and reliable wafer-level 3d microassembly Int. Conf. on Robotics and Automation (Seoul) pp 133-8
7. Weck M and Petersen B 1999 High precision positioning stage for micro assembly purposes Proc. SPIE 3680 734-9
8. Fatikow S, Kortschack A, Hudsen H, Sievers T and Wich T 2004 Towards fully automated microhandling Int. Workshop on Microfactories (Shanghai) pp 34-9
9. Tanikawa T, Kawai M, Koyachi N, Arai T, Ide T, Kaneko S, Ohta R and Hirose T 2001 Force control system for autonomous micro manipulation Int. Conf. on Robotics and Automation (ICRA) (Seoul) pp 610-5
10. Nienhaus M, Ehrfeld W, Michel F, Greaff V and Wolf A 1998 Automatic microassembly of radar sensors for automative applications Proc. SPIE 3511 135-42
11. Thompson J A and Fearing R S 2001 Automating microassembly with ortho-tweezers and force sensing Int. Conf. on Intelligent Robots and Systems (IROS) (Maui HI)
12. Miyazaki H and Sato T 1997 Mechanical assembly of three-dimensional microstructures from fine particles Adv. Robot. 11 139-85
13. Saito S, Miyazaki H and Sato T 1999 Pick and place operation of a micro object with high reliability and precision based on micro physics under sem Int. Conf. on Robotics and Automation (ICRA) (Detroit MI) pp 2736-43
14. Breguet J M and Bergander A 2001 Toward the personal factory? Proc. SPIE 4568 293-303
15. Shimada E, Thompson J A, Yan J, Wood R and Fearing R S 2000 Prototyping millirobots using dextrous microassembly and folding ASME IMECE/DSCD (Orlando FL) pp 1-8
16. Bloss R 2004 Micro and modular assembly approaches headline fall shows Assem. Autom. 24 148-51
17. Fatikow S and Rembold U 1996 An automated microrobot-based desktop station for micro assembly and handling of microobjects ETFA 96 IEEE Conf. on Emerging Technologies and Factory Automation (Kauai, HI) pp 586-92
18. Weck M and Peschke C 2004 Equipment technology for flexible and automated micro-assembly Microsyst. Technol. 10 241-6
19. Winzek B, Schmitz S and Sterzl T 2004 Microgrippers with shape memory thin film actuators Int. Precision Assembly Seminar (Bad Hofgastein) pp 77-84
20. Eberhardt R, Scheller T, Tittelbach G and Guyenot V 1998 Automated assembly of micro-optical components Proc. SPIE 3202 117-27
21. Skidmore G D, Ellis M, Parker E, Sarkar N and Merkle R 2000 Micro assembly for top down nanotechnology Int. Symp. on Mechatronics and Human Science (Nagoya) pp 3-9
22. Nienhaus M, Ehrfeld W, Michel F, Graeff V and Wolf A 1999 Handling and bonding of millimeterwave monolithic integrated circuits with high density interconnections for automotive and it applications 3rd Workshop on 'Area Array Packaging Technologies' (Berlin)
23. De Lit P, Agnus J, Clévy C and Chaillet N 2004 A four-degree-off-freedom microprehensile microrobot on chip Assem. Autom. 24 33-42
24. Perez R, Agnus J, Clévy C, Hubert A and Chaillet N 2005 Modelling, fabrication and validation of a high performance 2 dof microgripper IEEE/ASME Trans. Mechatronics 10 161-71
25. Bergander A, Breguet J M and Clavel R 2003 Micropositioners for microscopy applications and microbiology based on piezoelectric actuators J. Micromechatronics 2 65-76
26. Clévy C, Hubert A and Chaillet N 2004 A new micro-tools exchange principle for micromanipulation Int. Conf. on Intelligent Robots and Systems (IROS) (Sendai)
27. Gauthier M, Lopez-Walle B and Clévy C 2005 Comparison between micro-objects manipulations in dry and liquid mediums Int. Symp. on Computational Intelligence in Robotics and Automation (Espoo)
28. Clévy C, Hubert A, Agnus J and Chaillet N 2004 A micromanipulation cell including a microtools changer Int. Workshop on Microfactories (Shanghai) pp 166-9