AFM-study of sticking effects for microparts handling

Wear

Volumn 238, Issue 1, 2000, Pages 20-24

  Vogeli B ^a   Von Kanel H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

AFM; Microparts; Silicon microgripper; Sticking effects

Indexed keywords

ATOMIC FORCE MICROSCOPY; COATINGS; FRICTION; GRIPPERS; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES;

MICROPARTS; SILICON MICROGRIPPERS; STICKING EFFECTS;

WEAR OF MATERIALS;

MICROSCOPY; SILICON; STICK SLIP FRICTION;

EID: 0343183169     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(99)00336-1     Document Type: Conference Paper

References (25)

1. R.S. Fearing, IEEE Int. Conf. Intelligent Robots and Systems, August 1995, Pittsburgh, pp. 212-217.
2. F. Arai, D. Ando, T. Fukuda, Y. Nonoda, T. Oota, IEEE Int. Conf. Intelligent Robots and Systems, August 1995, Pittsburgh, pp. 236-241.
3. Binnig G., Quate C.F., Gerber Ch. Phys. Rev. Lett. 56:1986;930.
4. Mate C.M., McClelland G.M., Erlandsson R., Chiang S. Phys. Rev. Lett. 59:1987;1942.
5. Germann G.J., Cohen S.R., Neubauer G., McClelland G.M., Seki H. J. Appl. Phys. 73:1993;163.
6. Fujisawa S., Kishi E., Sugawara Y., Morita S. Phys. Rev. B. 51:1995;7849.
7. Pethica J.B., Oliver W.C. Phys. Scr., T. 19:1987;61.
8. Blackmann G.S., Mate C.M., Philpott M.R. Phys. Rev. Lett. 65:1990;2270.
9. Weisenhorn A.L., Hansma P.K., Albrecht T.R., Quate C.F. Appl. Phys. Lett. 54:1989;2651.
10. Burnham N.A., Dominguez D.D., Mowery R.L., Colton R.J. Phys. Rev. Lett. 64:1990;1931.
11. A. Torii, M. Sasaki, K. Hane, S. Okuma, IEEE Solid-State Sensor and Actuator Workshop, June 1992, South Carolina, p. 111.
12. Ciraci S., Tekman E., Baratoff A., Batra I.P. Phys. Rev. B. 46:1992;10411.
13. Stern J.E., Terris B.D., Mamin H.J., Rugar D. Appl. Phys. Lett. 53:1988;2717.
14. Burnham N.A., Colton R.J., Pollock H.M. Phys. Rev. Lett. 69:1992;144.
15. G. Greitmann, R.A. Buser, Seminar on Handling and Assembly of Microparts, Vienna, Austria, Nov. 14th, 1994.
16. G. Danuser, I. Pappas, B. Vögeli, W. Zesch, J. Dual, Manipulation of microscopic objects with nanometer precision: potentials and limitations in nano-robot design, Int. J. Rob. Res., submitted for publication.
17. Burnham N.A., Colton R.J. J. Vac. Sci. Technol., A. 7:1989;2906.
18. R.L. Alley, G.J. Cuan, R.T. Howe, K. Komvopoulos, IEEE Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, USA, 22-25 June 1992, p. 202.
19. J.N. Israelachvili, Intermolecular and Surface Forces, Academic, New York, 1985.
20. Kim K.S., Winograd N., Davis R.E. J. Am. Chem. Soc. 93:1971;6296.
21. Altefco, Oberflächentechnik, CH-8362 Balterswil.
22. 2 correspond to the samples numbered 461719 and 461721, respectively.
23. Fritz Buser, Oberflächentechnik, CH-3428 Wiler, sample 478014.
24. Schlapbach et al., Inst. of Physics, CH-1700 Freiburg.
25. B. Vögeli, H. von Känel, ECASIA 97, Göteborg, Sweden, 16-20 June, 1997.