Bidirectional electrothermal electromagnetic torsional microactuators for large angular motion at dc mode and high frequency resonance mode operation

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Eun, Youngkee ^a   Na, Hyungjoo ^a   Jeong, Bongwon ^a   Lee, Jae Ik ^a   Kim, Jongbaeg ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR DISPLACEMENT; ANGULAR MOTIONS; AT RESONANCE; BIDIRECTIONAL MOTION; CENTER OF ROTATION; CURRENT FLOWING; DC MODE; DC VOLTAGE; DEVICE LAYERS; HIGH-FREQUENCY RESONANCE; MICRO MIRROR; MODE OPERATION; NOVEL DESIGN; OPERATIONAL VOLTAGE; OPTICAL ANGLE; RESONANCE MODE; SILICON BEAMS; SILICON ON INSULATOR WAFERS; SINGLE CRYSTAL SILICON; SINUSOIDAL DRIVING; TORSION BAR; TORSIONAL DISPLACEMENTS; TORSIONAL MICROMIRRORS; VERTICAL DIRECTION;

ELECTRIC POTENTIAL; LIGHT TRANSMISSION; LORENTZ FORCE; MAGNETIC FIELD EFFECTS; MICROACTUATORS; RESONANCE; SEMICONDUCTING SILICON COMPOUNDS; SINGLE CRYSTALS; THERMAL EXPANSION; THERMAL STRESS; TORSIONAL STRESS;

SILICON WAFERS;

EID: 68249134196     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065023     Document Type: Article

References (21)

1. Toshiyoshi H and Fujita H 1996 Electrostatic micro torsion mirrors for an optical switch matrix J. Microelectromech. Syst. 5 231-37
2. Kuo J N, Lee G B and Pan W F 2005 Projection display technique utilizing three-color-mixing waveguides and microscanning devices Photonics Technol. Lett. IEEE 17 217-19
3. Yeow J T W, Yang V X D, Chahwan A, Gordon M L, Qi B, Vitkin I A, Wilson B C and Goldenberg A A 2005 Micromachined 2-D scanner for 3-D optical coherence tomography Sensors Actuators A 117 331-40
4. Nguyen H D, Hah D, Patterson P R, Chao R, Piyawattanametha W, Lau E K and Wu M C 2004 Angular vertical comb-driven tunable capacitor with high-tuning capabilities J. Microelectromech. Syst. 13 406-13
5. Kim J, Choo H, Lin L and Muller R S 2006 Microfabricated torsional actuators using self-aligned plastic deformation of silicon J. Microelectromech. Syst. 15 553-62
6. Eun Y and Kim J 2008 1-DOF and 2-DOF torsional micromirrors driven by in-plane thermal actuators 4th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies 2008 APCOT 2008 (Tainan, 22-25 June)
7. Miyajima H, Asaoka N, Arima M, Minamoto Y, Murakami K, Tokuda K and Matsumoto K 2001 A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges J. Microelectromech. Syst. 10 418-24
8. Hah D, Huang S T, Tsai J, Toshiyoshi H and Wu M C 2004 Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators J. Microelectromech. Syst. 13 279-89
9. Sasaki M, Yuki S and Hane K 2006 Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar Photonics Technol. Lett. IEEE 18 1573-5
10. Jain A, Qu H, Todd S and Xie H 2005 A thermal bimorph micromirror with large bi-directional and vertical actuation Sensors Actuators A 122 9-15
11. Lammel G, Schweizer S, Schiesser S and Renaud P 2002 Tunable optical filter of porous silicon as key component for a MEMS spectrometer J. Microelectromech. Syst. 11 815-28
12. Elata D and Mahameed R 2006 A temperature-gradient driven micromirror with large angles and high frequencies 19th IEEE Int. Conf. on Micro Electro Mechanical Systems, 2006, MEMS 2006 (Istanbul, 22-26 January) pp 850-3
13. Cao A, Kim J and Lin L 2007 Bi-directional electrothermal electromagnetic actuators J. Micromech. Microeng. 17 975-82
14. Long Q, Jae-Sung P and Gianchandani Y B 2001 Bent-beam electrothermal actuators: Part I. Single beam and cascaded devices J. Microelectromech. Syst. 10 247-54
15. Blick R H et al 2002 Nanostructured silicon for studying fundamental aspects of nanomechanics J. Phys.: Condens. Matter 14 905-45
16. Ji C H, Choi M, Kim S C, Lee S H, Kim S H, Yee Y and Bu J U 2006 An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame J. Micromech. Microeng. 16 1033-9
17. Zhou G, Du Y, Zhang Q, Feng H and Chau F S 2008 High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating J. Micromech. Microeng. 18 085013
18. Ji C-H, Choi M, Kim S-C, Song K-C, Bu J-U and Nam H-J 2007 Electromagnetic two-dimensional scanner using radial magnetic field J. Microelectromech. Syst. 16 989-96
19. Hsu S, Klose T, Drabe C and Schenk H 2008 Fabrication and characterization of a dynamically flat high resolution micro-scanner J. Opt. A: Pure Appl. Opt. 10 044005
20. Chiao M and Lin L 2000 Self-buckling of micromachined beams under resistive heating J. Microelectromech. Syst. 9 146-51
21. Su G D J, Toshiyoshi H and Wu M C 2001 Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors Photonics Technol. Lett. IEEE 13 606-8