High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating

Journal of Micromechanics and Microengineering

Volumn 18, Issue 8, 2008, Pages

  Zhou, Guangya ^a   Du, Yu ^a   Zhang, Qingxin ^b   Feng, Hanhua ^b   Chau, Fook Siong ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; DIFFRACTION; DIFFRACTION GRATINGS; ELECTROMECHANICAL DEVICES; GOLD; LASER BEAMS; LASERS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OPTICAL DESIGN; OPTICAL SYSTEMS; SOLDERED JOINTS; SPEED;

APPLICATIONS.; DC BIASING; ELECTROSTATICALLY DRIVEN; GOLD-COATED; HIGH SPEEDS; IN-PLANE; IN-PLANE MOTION; INCIDENT LASER; LASER-SCANNING; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-MIRRORS; OPTICAL EFFICIENCY; OPTICAL RESOLUTION; OPTICAL-; RESONANT FREQUENCIES; SCAN ANGLES; SUB-WAVELENGTH; SUB-WAVELENGTH GRATING; WAVE FRONT DEFORMATION;

SCANNING;

EID: 49749114843     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/8/085013     Document Type: Article

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