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Volumn 92, Issue 10, 2001, Pages 1145-1150
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Thermodynamic prediction of metastable coating structures in PVD processes
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Author keywords
(Ti, Al) N coatings; Metastable coating structures; PVD; Thermodynamic calculation methods
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Indexed keywords
CALORIMETRY;
COATINGS;
SODIUM CHLORIDE;
THERMODYNAMIC PROPERTIES;
TRANSITION METALS;
HEXAGONAL WURTZITE;
METASTABLE COATING STRUCTURES;
PHYSICAL VAPOR DEPOSITION;
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EID: 0035472358
PISSN: 00443093
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (22)
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References (19)
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