Analysis of excitation processes and electron temperature changes from spectral data in a dc micro plasma discharge

Plasma Sources Science and Technology

Volumn 13, Issue 4, 2004, Pages 576-581

  Mariotti, Davide ^a   Maguire, Paul ^a   Mahony, Charles M O ^a   McLaughlin, James ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ELECTRIC EXCITATION; ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; MICROWAVES; NATURAL FREQUENCIES; PLASMA DEVICES; PRESSURE;

ELECTRON COLLISION; ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); ELECTRON TEMPERATURE; MICRO PLASMA DEVICE (MPD);

PLASMAS;

EID: 9944245572     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/13/4/004     Document Type: Article

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