Microcavity plasma devices and arrays: A new realm of plasma physics and photonic applications

Plasma Physics and Controlled Fusion

Volumn 47, Issue 12 B, 2005, Pages

  Eden, J G ^a   Park, S J ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CERAMIC MATERIALS; OPTICAL PROPERTIES; PHOTODETECTORS; ULTRAVIOLET RADIATION;

MATERIAL BOUNDARIES; MICROPLASMA; PHOTODETECTION; PLASMA SCIENCE;

PLASMAS;

EID: 27744559911     PISSN: 07413335     EISSN: None     Source Type: Journal    
DOI: 10.1088/0741-3335/47/12B/S07     Document Type: Conference Paper

References (14)

1. Park S-J, Chen J, Wagner C J, Ostrom N P, Liu C and Eden J G 2002 Microdischarge arrays: a new family of photonic devices IEEE J. Sel. Topics Quantum Electron. 8 387-94
2. Eden J G et al 2003 Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: arrays, emitters and photodetectors J. Phys. D: Appl. Phys. 36 2869-77
3. Park S-J, Eden J G, Chen J and Liu C 2004 Microdischarge devices with 10 or 30 νm square silicon cathode cavities: pd scaling and production of the XeO excimer Appl. Phys. Lett. 85 4869-71
4. Kushner M J 2004 Modeling of microdischarge devices: pyramidal structures J. Appl. Phys. 95 846-59
5. Kushner M J 2005 Modeling of microdischarge devices: plasma and gas dynamics J. Phys. D: Appl. Phys. 38 1633-43
6. Moselhy M, Petzenhauser I, Frank K and Schoenbach K H 2003 Excimer emission from microhollow cathode discharges in argon J. Phys. D: Appl. Phys. 36 2922-7
7. Tachibana K 2004 Design and control of microplasma devices based on spectroscopic diagnostics 2nd Int. Workshop on Microplasmas (Stevens Institute of Technology, Hoboken, New Jersey)
8. See, for example, [1, 2, and 6] and references cited therein
9. Park S-J, Eden J G, Chen J, Liu C and Ewing J J 2001 Arrays of silicon microdischarge devices with multicomponent dielectrics Opt. Lett. 26 1773-5
10. Park S-J, Chen K-F, Ostrom N P and Eden J G 2005 40,000 pixel arrays of ac-excited silicon microcavity plasma devices Appl. Phys. Lett. 86 111501
11. Park S-J, Eden J G and Ewing J J 2002 Photodetection in the visible, ultraviolet, and near-infrared with silicon microdischarge devices Appl. Phys. Lett. 81 4529-31
12. Ostrom N P and Eden J G 2005 Microcavity plasma photodetectors: photosensitivity, dynamic range, and the plasma-semiconductor interface Appl. Phys. Lett. 87 141101
13. Vaquila I, Rabalais J W, Wolfgang J and Nordlander P 2001 Doping dependence of electronic charge transfer on Si(100) Surf. Sci. 489 L561-L567
14. + Appl. Phys. Lett. 82 4447-9