Synthesis of silicon nanocones using rf microplasma at atmospheric pressure

Applied Physics Letters

Volumn 87, Issue 14, 2005, Pages 1-3

  Shirai, H ^a   Kobayashi, T ^b   Hasegawa, Y ^a  

^a SAITAMA UNIVERSITY   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CATALYSIS; PLASMAS; SILICON; SYNTHESIS (CHEMICAL);

CRYSTALLINE SILICON; NANOCLUSTERS; NUMBER DENSITY;

NANOSTRUCTURED MATERIALS;

EID: 28344456934     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2084342     Document Type: Article

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