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Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 1106-1109

Properties of DLC thin films produced by RF PE-CVD from pyrrole monomer

(3) Takai, O a Anita, V a,b Saito, N a

a NAGOYA UNIVERSITY (Japan)

b ALEXANDRU IOAN CUZA UNIVERSITY OF IASI (Romania)

Author keywords

Diamond like carbon; Electrical resistivity; Mechanical properties; Pyrrole monomer; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; ELECTRIC CONDUCTIVITY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; MECHANICAL PROPERTIES; MONOMERS; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERS; SURFACE PROPERTIES;

DLC THIN FILMS; PYRROLE MONOMER;

THIN FILMS;

DIAMOND-LIKE CARBON; FILM; MECHANICAL PROPERTY;

EID: 24644519830 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.024 Document Type: Article

Times cited : (16)

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