Advanced determination of piezoelectric properties of AlN thin films on silicon substrates

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 903-906

  Sanchez Rojas J L ^a   Hernando, J ^a   Ababneh, A ^b   Schmid, U ^b   Olivares, J ^c   Clement, M ^c   Iborra, E ^c  

^a UNIVERSITY OF CASTILLA LA MANCHA   (Spain)

^b SAARLAND UNIVERSITY   (Germany)

^c UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

Piezoelectric constants; Aluminum Nitride; vibrometer

Indexed keywords

ALN; ALN LAYERS; ALN THIN FILMS; APPLIED VOLTAGES; EXPERIMENTAL DATA; FIELD-INDUCED DEFORMATION; INTERFEROMETRIC MEASUREMENT; LASER SCANNING VIBROMETRY; NUMERICAL CALCULATION; PIEZOELECTRIC CONSTANT; PIEZOELECTRIC CONSTANTS ALUMINUM NITRIDE VIBROMETER; PIEZOELECTRIC DEFORMATION; PIEZOELECTRIC PROPERTY; QUANTITATIVE INFORMATION; RELATIVE CONTRIBUTION; SILICON SUBSTRATES; SUBSTRATE CONDITIONS; SUBSTRATE DEFORMATION; TOP SURFACE; VERTICAL RESOLUTION;

ALUMINA; ALUMINUM; DEFORMATION; ELECTRIC FIELDS; NITRIDES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES;

ALUMINUM NITRIDE;

EID: 67649355216     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0218     Document Type: Conference Paper

References (13)

1. B. Piekarski, D. DeVoe, M. Dubey, R. Kaul, J. Conrad, Sensors and Actuators A, 91 (2001), pp 313-320.
2. G. Perçin, B.T. Khuri-Yakub, Ultrasonics 40 (2002), pp 441-448.
3. P. Cong, T-L. Ren, L-T. Liu, Microelectronic Engineering, 66 (2993), pp 779-784.
4. E. Iborra, M. Clement, J. Sangrador, A. Sanz-Hervás, L. Vergara, M. Aguilar, IEEE Transactions on Ultrasonics Ferroelectrics, and Frequency Control, 51 (2004), pp 352-358.
5. Günther, M. Egretzberger, A. Kugi, K. Kapser, B. Hartmann, U. Scmid, H. Seidel, IEEE Sensors Journal, 6 (2006), pp 596-604.
6. E. Iborra, L. Vergara, J. Sangrador, M. Clement, A. Sanz-Hervás, J. Olivares, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 54 (2007), pp 2367-2375.
7. M-A. Dubois and P. Muralt, Applied Physics Letters, 74 (1999), pp 3032-3034.
8. J. A. Christman, R.R. Woolcott, Jr., A.I. Kingon, R.J. Nemanich, Applied Physics Letters, 73 (1998), pp 3851-3853.
9. A. L. Kholkin, Ch. Wütchrich, D. V. Taylor, and N. Setter, Review of Scientific Instruments, 67 (1996), pp. 1935-1941.
10. M-A. Dubois and P. Muralt, Journal of Applied Physics, 89 (2001), pp 6389-6395.
11. R. Herdier, D. Jenkins, E. Dogheche, D. Rèmiens, and M. Sulc, Review of Scientific Instruments, 77 (2006), pp 093905.
12. Hernando, J.; Sánchez-Rojas, J. L.; González-Castilla, S.; Iborra, E.; Ababneh, A.; Schmid, U.. Journal of Applied Physics, Sep2008, Vol.104 Issue 5, pN.PAG, 9p; DOI: 10.1063/1.2957081; (AN 34360647)
13. Z. Wang and J. Miao, J. Phys. D 41, 035306, 2008. 906