Nonlinear dynamics of nanomechanical beam resonators: Improving the performance of NEMS-based sensors

Nanotechnology

Volumn 20, Issue 27, 2009, Pages

  Kacem, N ^a   Hentz, S ^a   Pinto, D ^a   Reig, B ^a   Nguyen, V ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED-FORM EXPRESSION; CRITICAL AMPLITUDES; DESIGN PARAMETERS; DOUBLY CLAMPED BEAM; ELECTRICAL MEASUREMENT; EULER-BERNOULLI; FRINGING FIELD EFFECTS; HIGH NONLINEARITY; LINEAR BEHAVIOR; LOSS OF PERFORMANCE; MULTIPHYSICS MODEL; NANO-MECHANICAL BEAM RESONATORS; NON-LINEAR DYNAMICS; NON-LINEARITY; NUMERICAL INTEGRATIONS; PULL-IN; PULL-IN INSTABILITY; RESONANT SENSORS; SENSOR PERFORMANCE; SOI WAFERS;

ELECTROSTATIC ACTUATORS; NONLINEAR EQUATIONS; SENSORS; SILICON WAFERS;

RESONATORS;

ARTICLE; MICROELECTROMECHANICAL SYSTEM; MOLECULAR MECHANICS; NANOELECTROMECHANICAL SYSTEM; NONLINEAR SYSTEM; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SENSOR;

EID: 67649352752     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/27/275501     Document Type: Article

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