Design and fabrication of novel micro electromagnetic actuator

Microsystem Technologies

Volumn 15, Issue 8, 2009, Pages 1171-1177

  Lee, Chia Yen ^a   Chen, Zgen Hui ^b   Chang, Hsien Tseng ^c   Wen, Chih Yung ^c   Cheng, Chiang Ho ^b  

^a NATIONAL PINGTUNG UNIVERSITY   (Taiwan)

^b DA YEH UNIVERSITY   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BIO-MEDICAL; DIAPHRAGM DEFLECTION; ELASTIC LIMIT; ELECTRICAL CURRENT; ELECTROMAGNETIC ACTUATORS; MAGNETIC FORCE; MICROCOIL; PLANAR STRUCTURE; STUDY DESIGN;

ACTUATORS; ELECTROMAGNETS; MICROOPTICS; POLYIMIDES; SILICONES;

DIAPHRAGMS;

EID: 67649202070     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0734-9     Document Type: Conference Paper

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