Fabrication of functional components for electromagnetic microactuators

Microsystem Technologies

Volumn 12, Issue 7, 2006, Pages 670-675

  Ruffert, C ^a   Feldmann, M ^b   Buettgenbach, S ^b   Gatzen, H H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETISM; FABRICATION; MACHINE COMPONENTS; MICROMACHINING; OPTIMIZATION;

DRIVE SYSTEMS; MAGNETIC COMPONENTS; MICROACTUATOR'S GUIDES;

MICROACTUATORS;

EID: 33646929317     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0091-5     Document Type: Article

References (12)

1. Boellaard E, Pham NP, van den Brekel LDM, Burghartz JN (2001) RF-devices realized in MEMS by using electro-depositable photoresist. In: Proceedings of SAFE2001, vol. 28-29, pp 1-7
2. Büttgenbach S, Feldmann M (2005) Application of thick film resists in MEMS, ICMAT, (accepted)
3. Feldmann M, Büttgenbach S (2003) A novel fabrication technique using UV-lithography for polymer magnets in micro actuators and generators. Proc Eurosens XVII:1217-1220
4. Feldmann M, Büttgenbach S (2005) A novel Lorenz force actuator using polymer magnets. In: Intermag 2005 IEEE international magnetics conference, pp 978
5. Feldmann M, Güttler J, Eickstädt J, Büttgenbach S (2004) A novel monolithical micro plunger coil actuator using polymer magnets and double layer micro coils. Proc Eurosens XVIII:34-35
6. Feldmann M, Waldschik A, Büttgenbach S (2005) Technology and application of electrodepositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors. HARMST2005 (accepted)
7. Heschel M, Bouwstra S (1998) Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon. Sens Actual A70:75-80
8. Kohlmeier T, Budde T, Gatzen HH (2002) Electromagnetic bearing system for integration in a linear microactuator. Eurosensors XVI:1217-1220
9. Kohlmeier T, Seidemann V, Buettgenbach S, Gatzen HH (2004) An investigation on technologies to fabricate microcoils for miniaturized actuator systems. Microsyst Technol 10(3): 175185
10. Lagorce LK, Brand O, Allen MG (1999) IEEE J. Microelectromech Syst 8:2-9
11. Pham NP, Boellaard E, Burghartz JN (2004) Photoresist coating methods for integration of novel 3-D RF micro-structures. J Microelectromech Syst 13(3):491-499
12. Seidemann S, Kohlmeier T, Foehse M, Gatzen HH, Büttgenbach S (2004) High aspect ratio spiral and meander micro coils for actuator applications. HARMST 2003, Monterey, CA, USA, Microsystem Technologies 10(6/7): 564-570