Fabrication of drive and guide components for micro motors

Microsystem Technologies

Volumn 14, Issue 12, 2008, Pages 1941-1947

  Feldmann, M ^a   Waldschik, A ^a   Ruffert, C ^b   Gatzen, H H ^b   Buttgenbach S ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETISM; INSULATION; MAGNETIC MATERIALS; MOTORS; OPTIMIZATION; PHOTORESISTS; RELUCTANCE MOTORS; TECHNOLOGY;

COIL DESIGNS; DRIVING FORCES; FABRICATION PROCESSES; FABRICATION TECHNOLOGIES; FUNCTIONAL COMPONENTS; GERMANY; GUIDE COMPONENTS; INSULATION LAYERS; MAGNETIC ACTUATORS; MAGNETIC FORCES; MICRO MOTORS; NEW MATERIALS; OPTIMIZATION OF COMPONENTS; VARIABLE RELUCTANCE;

OPTICAL DESIGN;

EID: 51849142310     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0619-y     Document Type: Article

References (12)

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2. Feldmann M, Büttgenbach S (2007) Novel variable reluctance (VR) micro motors with compensated attraction force: concept, simulation, fabrication and test. Intermag 2007, IEEE Trans Magn 43(6):2567-2569
3. Feldmann M (2007) Technologien und Applikationen der UV- Tiefenlithographie: Mikroaktorik, Mikrosensorik und Mikrofluidik. Dissertation, Berichte aus der Mikro- und Feinwerktechnik, Band 20, Shaker Verlag, ISBN 978-3-8322-6146-7
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9. Ruffert C, Gatzen HH (2007b) Design and technology of a magnetic levitation system for linear micro actuators. In: Proc. ASME 2007, Las Vegas, Nevada, USA, DETC2007-34676, ISBN 0-7918-3806-4, 2007
10. Ruffert C, Li J, Denkena B, Gatzen HH (2007) Development and evaluation of an active magnetic guide for microsystems with an integrated air gap measurement system. IEEE Trans Magn 43(6):2716-2718
11. Seidemann V, Edler J, Büttgenbach S, Stölting H-D (2003) Linear variable reluctance (VR) micro motor with horizontal flux guidance: concept, simulation, fabrication and test. Transducer 2003, Boston, pp 1415-1418
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