Development and application of a diaphragm micro-pump with piezoelectric device

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 1001-1007

  Ma, H K ^a   Hou, B R ^a   Wu, H Y ^a   Lin, C Y ^a   Gao, J J ^a   Kou, M C ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b Innovative Technical Center   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FREQUENCY RESPONSE; MICROFABRICATION; PIEZOELECTRIC DEVICES; VIBRATION ANALYSIS; VOLTAGE CONTROL;

ALUMINUM CASES; CHAMBER VOLUME; CURVATURE CHANGE; MICRO-DIAPHRAGM PUMP;

DIAPHRAGMS;

EID: 44249111464     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0462-6     Document Type: Conference Paper

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