SCOPUS 정보 검색 플랫폼

Microsystem Technologies

Volumn 12, Issue 1-2 SPEC. ISS., 2005, Pages 173-179

Integrated electromagnetic microactuators with a large driving force

(4) Pan, C T a Yang, H b Chou, M C c Shen, S C c

a NATIONAL SUN YAT SEN UNIVERSITY (Taiwan)

b NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC FIELD EFFECTS; EXCIMER LASERS; LASER ABLATION; LOW TEMPERATURE EFFECTS; MAGNETIC ANISOTROPY; MAGNETIC MATERIALS; MICROMACHINING; SPUTTERING;

MAGNETIC FORCE; MAGNETIC PROCESSES; PERMALLOY; PLANAR COIL;

MICROACTUATORS;

EID: 30344468453 PISSN: 09467076 EISSN: None Source Type: Journal
DOI: 10.1007/s00542-005-0013-y Document Type: Conference Paper

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.