Membrane microcantilever arrays fabrication with PZT thin films for nanorange movement

Microsystem Technologies

Volumn 11, Issue 8-10, 2005, Pages 1121-1126

  Zhu, Hong ^a   Miao, Jianmin ^a   Chen, Bangtao ^a   Wang, Zhihong ^b   Zhu, Weiguang ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ARRAYS; HARD DISK STORAGE; LEAD COMPOUNDS; MULTILAYERS; NANOTECHNOLOGY; PERMSELECTIVE MEMBRANES; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SILICON WAFERS; SOL-GELS; THERMAL EFFECTS; THIN FILMS;

MICROCANTILEVER FABRICATION; MULTI-LAYER STRUCTURE; NANORANGE MOVEMENTS; PIEZOELECTRIC THIN FILMS;

PIEZOELECTRIC MATERIALS;

EID: 26444483236     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0512-x     Document Type: Conference Paper

References (7)

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