Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 547-550

  Mochizuki, Hiroaki ^a   Mekaru, Harutaka ^a   Kusumi, Shinji ^b   Sato, Noriaki ^c   Shimizu, Masami ^c   Yamashita, Michiru ^d   Shimada, Osamu ^b   Hattori, Tadashi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b SUSUMU Co Ltd   (Japan)

^c Juken Kogyo CoLtd   (Japan)

^d HYOGO PREFECTURAL INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Actuator; Ampere turns; Electromagnetic; LIGA; Microactuator; Solenoidal; Spiral microcoil; X ray lithography

Indexed keywords

ELECTROMAGNETIC FIELDS; FORCE CONTROL; METALLIZING; PIEZOELECTRICITY;

AMPERE TURNS; LIGA; SOLENOIDAL; SPIRAL MICROCOILS; X-RAY LITHOGRAPHY;

MICROACTUATORS;

EID: 33847277804     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0230-z     Document Type: Article

References (2)

1. Hattori T (2000) Documentation (V) of Mechanical Engineering Congress 2000, Japan, pp 558-559
2. H. Mekaru, S.Kusumi, N.Sato, M.Yamashita, O.Shimada T. Hattori (2004) Jpn J Appl Phys, 43 6B, pp 4036-4040