Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 455-463

  Chen, S C ^a   Cheng, C H ^b   Lin, Y C ^a  

^a NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

^b DA YEH UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROFORMING; MICROSTRUCTURE; NOZZLES; PHOTORESISTS; ULTRAVIOLET RADIATION;

MICROEJECTORS; MICROPUMPS; PHOTORESIST PATTERNING;

PIEZOELECTRIC DEVICES;

EID: 33847292301     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0209-9     Document Type: Article

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