Comparison between damping coefficients of measured perforated structures and compact models

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2008, Pages 236-241

  Veijola, T ^a   De Pasquale, G ^b   Soma, A ^b  

^a AALTO UNIVERSITY   (Finland)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; MEMS; MICROELECTROMECHANICAL DEVICES; POWDERS;

COMPACT MODELS; DAMPING COEFFICIENTS; MICROMECHANICAL TESTS; PERFORATED PLATES; PERFORATED STRUCTURES; SURFACE SHAPES;

STRUCTURAL DESIGN;

EID: 62249114935     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2008.4752991     Document Type: Conference Paper

References (6)

1. E.S. Kim, Y.H. Cho and M.U. Kim, "Effect of Holes and Edges on the Squeeze Film Damping of Perforated Micromechanical Structures" Proceedings of IEEE Micro Electro Mechanical Systems Conference, pp. 296-301,1999.
2. A. Somà and G. De Pasquale, "Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in MEMS", Proc. DTIP Symposium on Design, Test, Integration and Packaging of MEMS & MOEMS, pp. 230-239, 2007.
3. M. Bao, H. Yang, Y. Sun and P.J. French, "Modified Reynolds' equation and analytical analysis of perforated structures", J. Micromech. Mcroeng., vol. 13, pp. 795-800, 2003.
4. T. Veijola, "Analytic Damping Model for an MEM Perforation Cell", Microfluidics and Nanofluidics, vol. 2, pp. 249-260, 2006.
5. T. Veijola, "Analytic Damping Model for a Square Perforation Cell", Proc. of the 9th International Conference on Modeling and Simulation of Microsystems, pp. 554-557, 2006.
6. C. J. Morris and F. K. Forster, "Oscillatory Flow in Microchannels", Experiments in Fluids, vol. 36, pp. 924-937, 2004.