Reduced order modeling of fluid structural interactions in MEMS based on model projection techniques

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1840-1843

  Mehner, J E ^a   Doetzel, W ^a   Schauwecker, B ^b   Ostergaard, D ^c  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b DAIMLER AG   (Germany)

^c ANSYS INC   (United States)

Author keywords

Chemical technology; Damping; Electromechanical systems; Electrostatics; Finite element methods; Fluid dynamics; Micromechanical devices; Navier Stokes equations; Transfer functions; Viscosity

Indexed keywords

ACTUATORS; DAMPING; ELECTROMECHANICAL DEVICES; ELECTROSTATICS; FINITE ELEMENT METHOD; FLUID DYNAMICS; MICROSYSTEMS; SOLID-STATE SENSORS; TRANSDUCERS; TRANSFER FUNCTIONS; TRANSIENT ANALYSIS; VISCOSITY;

AUTOMATICALLY GENERATED; CHEMICAL TECHNOLOGIES; ELECTROMECHANICAL SYSTEMS; FLUID STRUCTURAL INTERACTIONS; HARMONIC TRANSFER FUNCTIONS; MICROMECHANICAL DEVICE; PROJECTION TECHNIQUES; STRUCTURAL INTERACTIONS;

NAVIER STOKES EQUATIONS;

EID: 34547983489     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217146     Document Type: Conference Paper

References (5)

1. J.E. Mehner, L.D. Gabbay, and S.D. Senturia: Computer-Aided Generation of Nonlinear Reduced-Order Dynamic Macro-models, J. Microelectromech. Syst., Vol. 9 No. 2, 270-277, 2000
2. ANSYS 7.0 Documentation, ANSYS Inc., Canonsburg PA. USA 2002
3. J.E. Mehner, S. Kurth, D. Billep, et.al.: Simulation of Gas Film Damping on Microstructures with Nontrivial Geometries, Proc. of the MEMS Conference, Germany, 1998
4. T. Veijola: End effects of rare gas flow in short channels and squeezed-film dampers, MSM 2002, 104-107, San Juan 2002
5. B. Schauwecker, K.M. Strohm, J.E. Mehner, et.al. : Toggle-Switch - A new type of RF MEMS switch for power applications, IMS 2002, Vol. 1, 219-222, Seattle, USA