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Volumn 19, Issue 5, 2009, Pages 591-597

Robust adaptive tracking control of uncertain electrostatic micro-actuators with H-infinity performance

Author keywords

Dynamic surface control; Electrostatic device; H infinity control; Micro actuator; Uncertain systems

Indexed keywords

CLOSED LOOP SYSTEMS; CONTROLLERS; DEGREES OF FREEDOM (MECHANICS); ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; ELECTROSTATICS; MICROOPTICS; UNCERTAIN SYSTEMS;

EID: 67349231201     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2009.01.006     Document Type: Article
Times cited : (29)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.