Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties

Proceedings of the American Control Conference

Volumn 2006, Issue , 2006, Pages 1233-1236

  Zhu, Guchuan ^a   Penet, Julien ^a   Saydy, Lahcen ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTROSTATICS; MATHEMATICAL MODELS; MEMS; SYSTEM STABILITY;

MEMS CONTROL SYSTEMS; PARAMETRIC UNCERTAINTIES; ROBUST CONTROL LAWS;

ROBUSTNESS (CONTROL SYSTEMS);

EID: 34047192431     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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