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Volumn 18, Issue 5-8, 2009, Pages 990-994
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Diamond-like carbon films synthesized under atmospheric pressure synthesized on PET substrates
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Author keywords
Atmospheric pressure; Diamond like carbon; Gas barrier
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Indexed keywords
AVERAGE GROWTH RATE;
CVD METHOD;
DIAMOND-LIKE CARBON;
DLC FILM;
GAS BARRIER;
GAS BARRIER PROPERTIES;
LOW PRESSURE PLASMA;
MACRO-PARTICLES;
PET BOTTLES;
PET SUBSTRATE;
RADIO FREQUENCIES;
RF PLASMA;
ROOM TEMPERATURE;
ATMOSPHERIC PRESSURE;
ATMOSPHERICS;
ATOMIC LAYER DEPOSITION;
BEVERAGES;
CARBON FILMS;
CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
DIAMOND LIKE CARBON FILMS;
DIAMONDS;
GASES;
MICROHARDNESS;
PLASMA DEPOSITION;
PLASMAS;
SURFACE ROUGHNESS;
GAS PERMEABLE MEMBRANES;
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EID: 67349199164
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2008.11.022 Document Type: Article |
Times cited : (36)
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References (30)
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