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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 44, Issue 50-52, 2005, Pages

Synthesis of diamond-like carbon films by nanopulse plasma chemical vapor deposition in open air

(5) Kondo, Yoshimasa a,b Saito, Takao b Terazawa, Tatsuya b Saito, Masanori a Ohtake, Naoto a

a TOKYO INSTITUTE OF TECHNOLOGY (Japan)

b NGK Insulators (Japan)

Author keywords

Atmospheric plasma; CVD; DLC; Hard coatings; Nanopulse plasma; SI thyristor

Indexed keywords

ATMOSPHERIC PRESSURE; COATINGS; ENERGY ABSORPTION; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL);

ATMOSPHERIC PLASMA; DLC; HARD COATINGS; NANOPULSE PLASMA; SI THYRISTOR;

DIAMOND LIKE CARBON FILMS;

EID: 31844456250 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.44.L1573 Document Type: Article

Times cited : (20)

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