Microplasma-based treatment of inner surfaces in microfluidic devices

Contributions to Plasma Physics

Volumn 47, Issue 1-2, 2007, Pages 49-56

  Klages, C P ^a   Berger, C ^a   Eichler, M ^a   Thomas, M ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Coating; Microfluids; Microplasma; Surface treatment

Indexed keywords

ATMOSPHERIC CHEMISTRY; CHEMICAL MODIFICATION; COATINGS; DIELECTRIC BARRIER DISCHARGE; DIELECTRIC DEVICES; DIELECTRIC MATERIALS; FLUIDIC DEVICES; HYDROPHILICITY; HYDROPHOBICITY; METAMATERIALS; MICROFLUIDICS; PLASMA DEVICES; SILICA; SURFACE DISCHARGES; SURFACE TREATMENT;

HYDROPHILICS; HYDROPHOBICS; INNER SURFACES; MICRO-FLUID; MICRO-PLASMAS; MICROFLUIDICS DEVICES; MICROFLUIDICS SYSTEMS; NEW APPLICATIONS; PHYSICO-CHEMICALS; TECHNOLOGICAL PROCESS;

ATMOSPHERIC PRESSURE;

EID: 33947116271     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.200710008     Document Type: Conference Paper

References (19)

1. C.-P. Klages, K. Höpfner, N. Kläke, R. Thyen, Plasmas and Polymers 5, 79-89 (2000).
2. C.-P. Klages, M. Eichler, R. Thyen, New Diamond and Frontier Carbon Technology 13, 175-189 (2003).
3. Z. Zhang, B. Menges, R.B. Timmons, W. Knoll, R. Förch, Langmuir 19, 4765-4770 (2003).
4. M.E. Ryan, A.M. Hynes, J.P.S. Badyal, Chem. Mater. 8, 37-42 (1996).
5. A.T.A. Jenkins, J. Hu, Y.Z. Wang, S. Schiller, R. Förch, W. Knoll, Langmuir 16, 6381-6384 (2000).
6. S. Schiller, J. Hu, A.T.A. Jenkins, R.B. Timmons, F.S. Sanchez-Estrada, W. Knoll, R. Förch, Chem. Mater. 14, 235-242 (2002).
7. M. Thomas, M. von Hausen, C.-P. Klages, poster at PSE 2006, Plasma Processes and Polymers, accepted.
8. J. Borris, M.Thomas, C.-P. Klages, F. Faupel, V. Zaporojtchenko, poster at PSE 2006, Plasma Processes and Polymers, accepted.
9. C. Penache, C. Gessner, T. Betker, V. Bartels, A. Hollaender, C.-P. Klages, IEE Proc.-Nanobiotechnol. 151, 139-144 (2004).
10. C. Geßner, V. Bartels, T. Betker, U. Matucha, C. Penache, C.-P. Klages, Thin Solid Films 459, 118-121 (2004).
11. S. Kreitz, C. Penache, M. Thomas, C.-P. Klages, Surf. Coat. Technol. 200/1-4, 676-679 (2005).
12. N. Lucas, K. Nagel, C.-P. Klages, S. Büttgenbach, published at IWM 2006, Greifswald.
13. C. Penache, V. Bartels, C.-P. Klages, poster at Hakone DC, Padova 2004.
14. M. Eichler, J. Hacker, M. Thomas, C.-P. Klages, MST Kongress, Freiburg 2005.
15. R. Brendel and D. Bormann, J. Appl. Phys. 71, 1-6 (1992).
16. I. Papautsky, S. Mohanty, T. Ameel, A.B. Frazier, Proc. SPIE Micro Fluidic Devices and Systems, Santa Clara, CA, Sep. 20-22, 147-158 (1999).
17. D.B. Holmes, J.R. Vermeulen, Chem. Eng. Sci. 23, 717-722 (1968).
18. R.B. Bird, W.E. Stewart, E.N. Lightfoot, Transport Phenomena, John Wiley & Sons, 1960.
19. TRCVP, Vapor Pressure Database, Version 2.2P, Thermodynamic Research Center, Texas A&M University, College Station, TX.