SCOPUS 정보 검색 플랫폼

Volumn 21, Issue 2, 2003, Pages 515-517

Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; BINDING ENERGY; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; POLYETHYLENE TEREPHTHALATES; SILICON; SUBSTRATES;

RADIO FREQENCY PLASMA CHEMICAL VAPOR DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 0037356024 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1537717 Document Type: Article

Times cited : (17)

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