Gas barrier properties of carbon films synthesized by atmospheric pressure glow plasma

Surface and Coatings Technology

Volumn 201, Issue 3-4, 2006, Pages 913-917

  Kodama, Hideyuki ^a   Shirakura, Akira ^b   Hotta, Atsushi ^a   Suzuki, Tetsuya ^a  

^a KEIO UNIVERSITY   (Japan)

^b Technology Development Department   (Japan)

Author keywords

APG plasma; Carbon films; Gas barrier; PET

Indexed keywords

ACETYLENE; AMORPHOUS FILMS; ATMOSPHERIC PRESSURE; CARBON; GLOW DISCHARGES; MORPHOLOGY; POLYETHYLENE TEREPHTHALATES;

ATMOSPHERIC PRESSURE GLOW PLASMA; CARBON FILMS; DILUTION GASES; GAS BARRIER PROPERTIES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ACETYLENE; AMORPHOUS FILMS; ATMOSPHERIC PRESSURE; CARBON; GLOW DISCHARGES; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYETHYLENE TEREPHTHALATES;

EID: 33748557241     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.01.022     Document Type: Article

References (18)

1. Shimamura E., Nagashima K., and Shirakura A. Proceedings of 10th IAPRI World Conference on Packaging vol. 24-27 (1997) 251
2. Shirakura A. 6th Pan Asian PET Markets '99 Conference Proceedings (1999) 1920
3. Finch D.S., Franks J., Randall N.X., Barnetson A., Crouch J., Evans A.C., and Ralph B. Packag. Technol. Sci. 9 (1996) 73
4. Henry B.M., Erlat A.G., McGuigan A., Grovenor C.R.M., Briggs G.A.D., Tsukahara Y., Miyamoto T., Noguchi N., and Niijima T. Thin Solid Films 382 (2001) 194
5. Garcia-Ayuso G., Vazquez L., and Martinez-Duart J.M. Surf. Coat. Technol. 80 (1996) 203
6. Kanazawa S., Kogoma M., Moriwaki T., and Okazaki S. J. Phys., D. Appl. Phys. 21 (1988) 838
7. Yokoyama T., Kogoma M., Kanazawa S., Moriwaki T., and Okazaki S. J. Phys., D. Appl. Phys. 23 (1990) 374
8. Yokoyama T., Kogoma M., Moriwaki T., and Okazaki S. J. Phys., D. Appl. Phys. 23 (1990) 1125
9. Kanazawa S., Kogoma M., Okazaki S., and Moriwaki T. Nucl. Instrum. Methods Phys. Res. B37-B38 (1989) 842
10. Tanaka K., Inomata T., and Kogoma M. Thin Solid Films 386 (2001) 217
11. Kogoma M., Takahashi R., and Okazaki S. Symp. Plasma Sci. Mater. 7TH (1994) 125
12. Mori T., Tanaka K., Inomata T., Takeda A., and Kogoma M. Thin Solid Films 316 (1998) 89
13. Sawada Y., Ogawa S., and Kogoma M. J. Phys., D. Appl. Phys. 28 (1995) 1661
14. Ward L.J., Schofield W.C.E., and Badyal J.P.S. Langmuir 19 (2003) 2110
15. Foest R., dler F., Sigeneger F., and Schmidt M. Surf. Coat. Technol. 163-164 (2003) 323
16. Mishra K.K., Khardekar R.K., Singh R., and Pant H.C. Rev. Sci. Instrum. 73 (2002) 3251
17. Beshokov G., Lei S., Lazarova V., Nedev N., and Georgiev S.S. Vacuum 69 (2003) 301
18. Abbas G.A., Roy S.S., Papakonstantinou P., and McLaughlin J.A. Carbon 43 (2005) 303