Oxygen transmission of transparent diamond-like carbon films

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1112-1115

  Yamamoto, Shinya ^a   Kodama, Hideyuki ^a   Hasebe, Terumitsu ^b   Shirakura, Akira ^c   Suzuki, Tetsuya ^a  

^a KEIO UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKYO HOSPITAL   (Japan)

^c Technology Development Department   (Japan)

Author keywords

Diamond like carbon; Hardness; Microstructure; Optical properties

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; DEPOSITION; ELECTRIC RESISTANCE; HARDNESS; MICROSTRUCTURE; OPTICAL PROPERTIES; OXYGEN; POLYETHYLENE TEREPHTHALATES; SYNTHESIS (CHEMICAL);

CHEMICAL INERTNESS; PET BOTTLES; RADIO FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (RF-CVD); TRANSPARENT DIAMOND-LIKE CARBON FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 18544385186     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.10.025     Document Type: Conference Paper

References (12)

1. A. Grill, B.S. Meyerson, and V.V. Patel IBM J. Res. Develop. 34 1990 849
2. A. Grill IBM J. Res. Develop. 43 1999 147
3. D.S. Finch, J. Franks, N.X. Randall, A. Barnetson, J. Crouch, A.C. Evans, and B. Ralph Packag. Technol. Sci. 9 1996 73
4. E. Shimamura, K. Nagashima, and A. Shirakura 10th IAPRI World Conference on Packaging vol. 24-27 1997 251
5. M. Hwang, and C. Lee Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 75 2000 24
6. A. von Keudell, and W. Moller J. Appl. Phys. 75 1994 7718
7. J. Roberson Mater. Sci. Eng., R Rep. 37 2002 129
8. M.A. Tamor, and W.C. Vassell J. Appl. Phys. 76 1994 3823
9. A.C. Ferrari Phys. Rev., B 61 2000 14095
10. A.C. Ferrari Phys. Rev., B 64 2001 75414
11. J. Robertson Surf. Coat. Technol. 50 1992 185
12. X. Zhang, W.H. Weber, W.C. Vassell, T.J. Potter, and M.A. Tamor J. Appl. Phys. 83 1998 2820