Ion beam pattering of nano-gratings on SiC surface

Surface and Coatings Technology

Volumn 203, Issue 17-18, 2009, Pages 2442-2445

  Katharria, Y S ^a   Kumar, Sandeep ^a   Sharma, A T ^b   Chauhan, Devki ^c   Kanjilal, D ^a  

^a INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^b UNIVERSITY OF DELHI   (India)

^c ALIGARH MUSLIM UNIVERSITY   (India)

Author keywords

Atomic force microscopy; Nano dots; Ripples; Sputtering

Indexed keywords

ATOMIC-FORCE MICROSCOPIES; CONTINUUM MODELS; DISPERSION BEHAVIORS; ION FLUENCE; ION IRRADIATIONS; MORPHOLOGICAL EVOLUTIONS; NANO-DOTS; NANO-GRATINGS; RIPPLES; SELF ORGANIZATIONS; SURFACE NORMALS; WHITE LIGHTS;

ATOMIC FORCE MICROSCOPY; ATOMS; CHEMICAL MODIFICATION; CONTINUUM MECHANICS; SILICON CARBIDE;

IONS;

EID: 67349139900     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.02.112     Document Type: Article

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