Focused ion beam induced nanodot and nanofiber growth

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1491-1494

  Schoendorfer, C ^a   Lugstein, A ^a   Bertagnolli, E ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

FIB; GaAs; GaSb; Ion bombardment; Ion sputtering; Nanostructures; Sb

Indexed keywords

GROWTH (MATERIALS); ION BEAMS; ION BOMBARDMENT; SEMICONDUCTING ANTIMONY COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING GALLIUM COMPOUNDS; SPUTTERING;

FIB; GAAS; ION SPUTTERING; NANOSTRUCTURES;

NANOSTRUCTURED MATERIALS;

EID: 33646031212     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.089     Document Type: Article

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