Indium droplet elimination by radical beam irradiation for reproducible and high-quality growth of InN by RF molecular beam epitaxy

Applied Physics Express

Volumn 2, Issue 5, 2009, Pages

  Yamaguchi, Tomohiro ^a   Nanishi, Yasushi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLAT SURFACES; HIGH QUALITY; IN-SITU; INDIUM DROPLET; NITROGEN RADICAL; RADICAL BEAMS; RADIO FREQUENCY PLASMA; RICH CONDITIONS; THICK INN FILMS; UNDERLAYER;

COMMUNICATION CHANNELS (INFORMATION THEORY); CRYSTAL GROWTH; DROP FORMATION; INDIUM COMPOUNDS; IRRADIATION; MOLECULAR BEAMS; MOLECULAR DYNAMICS; SEMICONDUCTOR QUANTUM WIRES;

MOLECULAR BEAM EPITAXY;

EID: 66949111743     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.2.051001     Document Type: Article

References (14)

1. B. E. Foutz, S. K. O'Leary, M. S. Shur, and L. F. Eastman: J. Appl. Phys. 85 (1999) 7727.
2. B. R. Nag: J. Cryst. Growth 269 (2004) 35.
3. V. Y. Davydov, A. A. Klochikhin, R. P. Seisyan, V. V. Emtsev, S. V. Ivanov, F. Bechstedt, J. Furthmuller, H. Harima, A. V. Mudryi, J. Aderhold, O. Semchinova, and J. Graul: Phys. Status Solidi B 229 (2002) R1.
4. J. Wu, W. Walukiewicz, K. M. Yu, J. W. Arger III, E. E. Haller, H. Lu, W. J. Schaff, Y. Saito, and Y. Nanishi: Appl. Phys. Lett. 80 (2002) 3967.
5. T. Matsuoka, H. Okamoto, M. Nakao, H. Harima, and E. Kurimoto: Appl. Phys. Lett. 81 (2002) 1246.
6. J. B. MacChesney, P. M. Bridenbaugh, and P. B. O'conner: Mater. Res. Bull. 5 (1970) 783.
7. S. V. Ivanov, T. V. Shubina, V. N. Jmerik, V. A. Vekshin, P. S. Kop'ev, and B. Monemar: J. Cryst. Growth 269 (2004) 1.
8. X. Wang, S.-B. Che, Y. Ishitani, and A. Yoshikawa: Jpn. J. Appl. Phys. 45 (2006) L730.
9. C. S. Gallinat, G. Koblmüller, J. S. Brown, S. Bernardis, J. S. Speck, G. D. Chern, E. D. Readinger, H. Shen, and M. Wraback: Appl. Phys. Lett. 89 (2006) 032109.
10. Y. Nanishi, Y. Saito, and T. Yamaguchi: Jpn. J. Appl. Phys. 42 (2003) 2549.
11. C. S. Gallinat, G. Koblmüller, J. S. Brown, and J. S. Speck: J. Appl. Phys. 102 (2007) 064907.
12. T. Yamaguchi: in preparation for publication.
13. T. Yamaguchi, Y. Saito, C. Morioka, K. Yorozu, T. Araki, A. Suzuki, and Y. Nanishi: Phys. Status Solidi B 240 (2003) 429.
14. T. D. Veal, P. D. C. King, P. H. Jefferson, L. F. J. Piper, C. F. McConville, H. Lu, W. J. Schaff, P. A. Anderson, S. M. Durbin, D. Muto, H. Naoi, and Y. Nanishi: Phys. Rev. B 76 (2007) 075313.