Efficient and sensitive capacitive readout of nanomechanical resonator arrays

Nano Letters

Volumn 7, Issue 1, 2007, Pages 120-126

  Truitt, Patrick A ^a   Hertzberg, Jared B ^a   Huang, C C ^b   Ekinci, Kamil L ^c   Schwab, Keith C ^d  

^a Bldg 142   (United States)

^b Boston University   (United States)

^c BOSTON UNIVERSITY   (United States)

^d LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE READOUT; NANOMECHANICAL RESONATORS; QUANTUM INFORMATION PROCESSING; RESONATOR ARRAYS;

CIRCUIT THEORY; ELECTRIC IMPEDANCE; NANOTECHNOLOGY; READOUT SYSTEMS;

RESONATORS;

NANOMATERIAL;

ARTICLE; SCANNING ELECTRON MICROSCOPY; SENSITIVITY AND SPECIFICITY; TEMPERATURE;

MICROSCOPY, ELECTRON, SCANNING; NANOSTRUCTURES; SENSITIVITY AND SPECIFICITY; TEMPERATURE;

EID: 33846886347     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl062278g     Document Type: Article

References (27)

1. Roukes, M. L. Sci. Am. 2001, 285, 48.
2. Ekinci, K. L.; Huang, X. M. H.; Roukes, M. L. Appl. Phys. Lett. 2004, 84, 4469.
3. Ilic, B.: Yang, Y.; Craighead, H. G. Appl. Phys. Lett. 2004, 85, 2604.
4. Sidles, J. A.; Garbini, J. L.; Bruland, K. J.; Rugar, D.; Ruger, O.: Hoen, S.; Yannoni, C. S. Rev. Mod. Phys. 1995, 67, 249.
5. Rugar, D.: Budakian, R.; Mamin, H. J.; Chui, B. W. Nature 2004, 430, 329.
6. Minne, S. C.; Adams, J. D.; Yaralioglu, G.: Manalis, S. R.: Atalar, A.; Quate, C. F. Appl. Phys. Lett. 1998, 73, 1742.
7. Irish, E. K.; Schwab, K. C. Phys. Rev. B 2003, 68, 155311.
8. Cleland, A. N.; Geller, M. R. Phys. Rev. Lett. 2004, 93, 070501.
9. Carr, D. W.; Sekaric, L.; Craighead, H. G. J. Vac. Sci. Technol., B 1998, 16, 3821.
10. Kouh, T.; Karabacak, D.; Kim, D. H.: Ekinci, K. L. Appl. Phys. Lett. 2005, 86, 013106.
11. Harley, J. A.; Kenny, T. W. Appl. Phys. Lett. 1999, 75, 289.
12. Yurke, B.; Greywall, D. S.; Pargellis, A. N.: Busch, P. A. Phys. Rev. A 1995, 51, 4211.
13. Kirschbaum, J.; Hohberger, E. M.; Blick, R. H.; Wegscheider, W.; Bichler, M. Appl. Phys. Lett. 2002, 81, 280.
14. Cleland, A. N.; Aldridge, J. S.; Driscoll, D. C.; Gossard, A. C. Appl. Phys. Lett. 2002, 81, 1699.
15. Sazonova, V.; Yaish, Y.; Ustunel, H.; Roundy, D.; Arias, T. A.; McEuen, P. L. Nature 2004, 431, 284.
16. Knobel, R. G.; Cleland, A. N. Nature 2003, 424, 291.
17. LaHaye, M. D.; Buu, O.; Camarota, B.; Schwab, K. C. Science 2004, 304, 74.
18. Ekinci, K. L.; Roukes, M. L.; Rev. Sci. Instrum. 2005, 76, 061101.
19. Lin, L.; Nguyen, C. T.-C.; Howe, R. T.: Pisano, A. P. Microelectromechanical filters for signal processing. Technical Digest. IEEE Microelectromechanical Systems Workshop, Travemunde, Germany, Feb. 4-7, 1992; pp 226-231.
20. Two 47 μH chip inductors are used in series. The inductors are surface mount inductors with powdered iron core, model IMC-1210, 46 μH at B = 0, obtained from Vishay Dale. The capacitor is a surfacemount screw-type variable capacitor, trimmed by hand.
21. LC can be tuned by tuning the inductance of the powdered-iron core chip inductors using an external magnetic field. If no magnetic field is available, a varactor capacitor could possibly be used in place of the hand-trimmable capacitor for in situ adjustment of the LC resonance.
22. Bargatin, I.; Myers. E. B.; Arlett, J.; Gudlewski, B.; Roukes, M. L. Appl. Phys. Lett. 2005, 86, 133109.
23. Cleland, A. N.: Roukes, M. L. Sens. Actuators 1999, 72, 256.
24. Yang, Y. T.; Callegari, C.; Feng, X. L.; Ekinci, K. L.; Roukes, M. L. Nano Lett. 2006, 6, 583.
25. Oukhanski, N.; Grajcar, M.; Il'ichev, E.; Meyer, H.-G. Rev. Sci. Instrum. 2003, 74, 1145.
26. Naik, A.; Buu, O.; LaHaye, M. D.; Blencowe, M. P.; Armour, A. D.; Clerk, A. A.; Schwab, K. C. Nature 2006, 443, 193.
27. Wallraff, A.; Schuster, D. I.; Blais, A.; Frunzio, L.; Majer, J.; Devoret. M. H.; Girvin, S. M.; Schoelkopf, R. J. Phys. Rev. Lett. 2005, 95. 060501.