Advanced applications in microphotonics using proton beam writing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 12-13, 2009, Pages 2280-2284

  Bettiol, A A ^a   Chiam, S Y ^a   Teo, E J ^a   Udalagama, C ^a   Chan, S F ^a   Hoi, S K ^a   van Kan, J A ^a   Breese, M B H ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

42.70.Ce; 42.82.Et; 81.16.Nd; 85.40.Hp; Lab on a chip; Metamaterials; Proton beam writing; Silicon photonics; Waveguides

Indexed keywords

42.70.CE; 42.82.ET; 81.16.ND; 85.40.HP; LAB-ON-A-CHIP; PROTON BEAM WRITING; SILICON PHOTONICS;

CERIUM; CERIUM COMPOUNDS; FABRICATION; METAMATERIALS; NEODYMIUM; PHOTONIC DEVICES; PROTON BEAMS; PROTONS; WAVEGUIDES;

ION BEAM LITHOGRAPHY;

EID: 66349102748     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2009.03.035     Document Type: Article

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